Specialist
Former Director at ASML Holding NV
Agenda
- EUV (extreme ultraviolet) lithography order volume outlook for ASML (AMS: ASML) and pricing trends
- Fab CAPEX and evolving lithography share by node size
- High-NA (numerical aperture) development trends and volume outlook
Questions
1.
There are plenty of estimates for wafer fab equipment CAPEX growth. What are your expectations? Where do you think we are in the broader cycle?
2.
When you talk about legacy and leading-edge capacity expansion, talking about wafer fab equipment CAPEX exclusively, under normal circumstances, what proportion of spend does lithography typically account for? Is it different between legacy and leading edge?
3.
Does litho count for around 20% of total equipment spend?
4.
Do you think that when we start talking about 2nm, lithography will represent an even larger share of CAPEX?
5.
What do you think about the gross margin on system sales as the technology in the platform matures?
6.
What assumptions are you making to get to 80-85 EUV [extreme ultraviolet] units per year by 2025?
7.
What throughput can one unit do, how many layers?
8.
When calculating the volume, do you multiply 200-250 wafers per hour by the number of EUV layers to get the theoretical unit capacity requirements?
9.
How does the EUV layer count equation scale? Presumably at smaller nodes, you’re using more EUV layers. How does that lead to increasing demand for units?
10.
What is the typical build time? How long does it take to construct one of these machines and ship it? There’s presumably quite a long install period at the client end.
11.
What is the biggest limiting factor? Is it the availability of key components from Zeiss and Trumpf?
12.
Is the build time nine months including manufacturing, delivery and installation at the client end, or is it longer?
13.
You mentioned your volume expectations for immersion tools. What ASP action do you expect on those immersion tools?
14.
Are there any significant CAPEX hurdles to scaling up production volumes to 80-85 EUV units per year by 2025? Do you think there is a need to spend incrementally more on building out capacity?
